FREMONT, USA: Mattson Technology Inc., a leading supplier of advanced process equipment used to manufacture semiconductors, has received orders for multiple SUPREMA photoresist strip systems from a leading semiconductor manufacturer.
The systems are scheduled to ship in the first quarter of 2012 and will be used for advanced gate strip and other critical ashing applications for volume production of advanced logic devices through the next-generation technology nodes.
"Our customer selected the SUPREMA based on the device performance benefits achieved with the system running photoresist strip processes over sensitive gate stack materials at the most advanced technology nodes," said Rene George, VP and GM of Mattson Technology's Plasma Products Group.
"This first volume order for SUPREMA by a logic production fab further extends Mattson Technology's share in the strip arena and reinforces the system's ability to deliver high-performance, repeatable and reliable strip processes that our customers require to manufacture next-generation IC devices."
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