BEVERLY, USA: Axcelis Technologies Inc., a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced that one of the world's leading semiconductor manufacturers has placed follow-on orders for Integra RS plasma dry strip systems. The systems will be used in high volume production for logic and image sensor devices at two of the chipmaker's new, leading edge fabs. The systems began shipping in November 2011.
"We look forward to building on our relationship with this customer in the plasma dry strip segment as they expand their manufacturing operations," said Mary Puma, chairman and CEO.
"As devices become more complex, plasma cleaning processes are becoming increasingly critical in a greater percentage of the process flow in order to achieve performance and yield goals. The Integra tools address these new requirements with enabling process technology on a versatile, single-wafer platform. Unlike competitive systems, the Integra RS delivers a wide range of processes without compromising productivity – through a unique, modular design that provides unprecedented manufacturing flexibility and speed."
Axcelis is a recognized leader in FEOL and BEOL plasma cleaning and dry strip technology. Its systems are known worldwide for providing innovative process solutions, exceptional reliability and low cost of ownership. Axcelis' dry strip cleaning product portfolio includes the Integra RS and ES systems as well as the Rapidstrip 320 and 210 systems.
Together, these products deliver highly differentiated plasma cleaning technology to meet the full range of customer needs, from the highest productivity, non-oxidizing solutions for 32nm and below, to single chamber, small substrate size applications in the MEMS, LED, and packaging markets.