ST. FLORIAN, AUSTRIA: EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, introduced its SmartNIL large-area nanoimprint lithography (NIL) process.
Available on all EV Group NIL platforms, including mask aligners as well as the industry benchmark EVG®720 and newly available EVG®7200 UV-NIL systems, SmartNIL provides a low-cost, large-area and high-volume-manufacturing solution for a variety of advanced devices, including:
* Photonic-based devices such as light-emitting diodes (LEDs), lasers and photovoltaics.
* Micro arrays and nano-devices for medical devices and bioengineered applications.
* Advanced storage media, including newly emerging forms of non-volatile memory (NVM).