X-Ray-based metrology leader Jordan Valley Semiconductors acquires assets of Metrosol

MIGDAL HAEMEK, ISRAEL: Jordan Valley Semiconductors Ltd (JVS), a leading provider of X-ray based semiconductor metrology tools, has acquired the assets of Metrosol, an advanced Vacuum Ultra Violet (VUV) metrology tool firm, effective March 19, 2010.

Metrosol's state-of-the-art thin film measurement systems is a powerful metrology for the upcoming challenging ultra-thin films stacks of next-generation semiconductor nodes; it is also a proven technology for several critical applications for patterned imprint HDD Media manufacturing. Metrosol's short wavelength VUV metrology solution enables better and tighter process control on product wafers at a throughput suitable for high-volume manufacturing.

"The acquired VUV technology will strengthen Jordan Valley's position as a key metrology solutions provider for the sub 45nm semiconductors processes while expanding its capabilities to new markets such as the emerging patterned HDD market," commented Isaac Mazor, Jordan Valley CEO.

VUV technology is the most sensitive non-destructive optical metrology available for ultra thin FEOL layers such as Hi-K dielectric and Metal gates, therefore, complements Jordan Valley's well-established X-ray-based semiconductor metrology solutions, already in use in most advanced fabs worldwide.

Founded in 2002, Metrosol's SHORTY ES (Enhanced Spectrum) Series, short wavelength optical metrology systems is the only commercially-available technology able to collect optical reflectance data down to 120 nanometers. These shorter wavelengths enable greater sensitivity on thickness, composition, and optical property measurements on the complex films and stacks necessary to achieve desired device performance.