ALMERE, THE NETHERLANDS: ASM International N.V. (ASMI) and Euronext Amsterdam (ASM) announced that it has sold its Pulsar q (ALD) system for high-k gates to two top Japanese logic device manufacturers for insertion in the 32/28nm technology node.
The tools will be used for hafnium-based high-k gate dielectrics, as well as for the dielectric capping layers used to tune work function of the gate stack. One customer also ordered ASM's EmerALD® process module for metal gates.
"These orders further extend our leadership position in delivering manufacturing solutions for high-k gates, having now shipped well over 100 Pulsar ALD tools," said Bob Hollands, Director of Marketing for Transistor Products at ASM. "The performance benefits of high-k films deposited in the Pulsar, and our customer-focused approach that enables process integration solutions, were key factors in gaining these new customers.
"With process integration knowledge for high-k gates growing, we are seeing the adoption of high-k metal gates now accelerate rapidly. The combination of Pulsar and EmerALD demonstrates the benefit of ASM's capability to deposit in a clustered system the high-k film, the dielectric capping layer and the metal electrode."
Friday, July 31, 2009
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