HamaTech’s MaskTrack Pro system for next generation lithography

SEMICON West 2009, STERNENFELS, GERMANY: HamaTech Advanced Process Equipment (APE) GmbH & Co. KG, announced its most advanced photomask processing system, the MaskTrack Pro, which extends the technology of HamaTech’s highly successful MaskTrack System to Next Generation Lithography applications; 193i 22nm half pitch (hp), Extreme Ultraviolet Lithography (EUVL) and Nano-Imprint Lithography (NIL).

Key to MaskTrack Pro is state-of–the-art cleaning technology that delivers unmatched particle removal down to 20nm while protecting 100 percent of the vulnerable mask structures and materials.

“Without the mask the lithography process cannot begin and without a pristine, defect-free mask at the point-of-exposure the probability of yield loss on Next Generation Lithography processes is a fact” said Wilma Koolen-Hermkens, Chief Executive Officer of HamaTech APE

“Mask Track Pro is the first system in the industry that can fully address zero particle and defect tolerance levels on the mask prior to exposure. We are encouraged by the positive response received from Semiconductor IDM’s and OEM’s that require the capabilities of the MaskTrack Pro to eliminate a key barrier of entry for new Lithography methods.”

MaskTrack Pro combines innovative cleaning technology with sophisticated platform design for a mask integrity system ready to meet the production challenges of 193i 22nm hp DPT, EUVL and NIL.

A unique combination of physical and chemical cleaning technologies enables customers to effectively remove organic and inorganic contamination without damage to the vulnerable features and material structures of the reticle.

Focused Spot Cleaning, a feature for the precise removal of particles in defined areas of the mask, saves significant time after repair and eliminates the toughest overlay issues caused by backside contamination. The new MaskTrack Pro design allows clustering of metrology systems and pod-in-pod stocking for a holistic mask management approach throughout the life of the mask.

MaskTrack Pro’s distinctive approach to mask integrity ensures that the mask is defect-free at exposure, offering customers a dramatic increase in tool productivity and uptime.

Over 500 HamaTech systems, including MaskTrack, have been shipped to semiconductor manufacturers and mask shops worldwide.