Plasma processing technical workshop held

USA: Plasma-Therm has provided an advanced, one-day plasma processing workshop at The University of Texas at Austin Microelectronics Research Center (MRC). Presentations addressed both fundamental and advanced plasma etching as well as deposition technologies used primarily in semiconductor device fabrication and materials science research.

The MRC facility, part of NNIN (National Nanofabrication Infrastructure Network), provides resources for both academic and industrial users and attracts researchers from throughout the world. Attendees included graduate students, facility staff, post-doctoral researchers, and engineers from 11 local companies and universities as well as from start-ups to market leaders.

This technology community outreach event attracted researchers involved in projects requiring process capability spanning a broad range of cutting edge research topics as diverse as solar energy, nanostructures, data storage, opto-telecommunications, and MEMS. Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has held similar one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.

Prof. Sanjay Banerjee, director at UT Austin’s MRC, reported:: “The recent workshop on plasma etching and deposition provided by Dr. David Lishan of Plasma-Therm was attended by over 70 people from the University of Texas and other schools and industrial labs. Extremely valuable training was provided about the fundamental physics of plasma processing, as well as practical insights about plasma etching and deposition.”

“The high attendance at these workshops is evidence of significant enthusiasm for information relating to semiconductor and materials processing.” Dr. David Lishan, Plasma-Therm principal scientist and workshop organizer continued, “Providing technical communities such as the one in Austin, with these plasma processing workshops is personally very satisfying and exposes Plasma-Therm to leaders in R&D in many different disciplines. We are especially honored that attendees have traveled as long as nearly four hours to participate.”