KLA-Tencor announces adoption of Candela CS20 platform by leading Korean LED device maker

MILPITAS, USA: KLA-Tencor Corp., the world's leading supplier of process control and yield management solutions for the semiconductor and related industries, announced that Korean company, Seoul Optodevice Co. Ltd, has become the latest LED device maker to adopt KLA-Tencor's Candela CS20 platform.

This significant sale marks the growing importance of defect inspection for the Metal Organic Chemical Vapor Deposition (MOCVD) process, and reinforces KLA-Tencor's continued focus on LED inspection.

Defects from epi and substrate processes can impact yield and field reliability. Critical epi defects include: pits, cracks, topographic anomalies, and surface non-uniformity, while substrate defects can include: particles, scratches and stains.

KLA-Tencor's Candela CS20 system is uniquely designed for the inspection of transparent materials—gallium nitride and sapphire—with simultaneous detection of surface reflectivity, topography, scatter and phase signatures. This automated inspection system, with real-time classification, provides actionable data for effective process control.

Commenting on the tool capability, Seoul Optodevice stated: "Inspection results from the Candela CS20 will enable us to optimize epi processes and improve productivity. Adoption of this advanced process control strategy will enhance the value to our customers through improved product quality and consistent performance. These benefits align directly with our goal to maintain leadership in this rapidly emerging market."

Jeff Donnelly, group vice president of the Growth and Emerging Markets division of KLA-Tencor, stated: "LED market growth is slated to be greater than 35 percent year-over-year. We are making significant investments in products that specifically address LED manufacturing needs. This investment, combined with our extensive experience in process control solutions, enables us to bring superior products to market rapidly to address the industry's cost and technology roadmaps."

The Candela CS20 is currently installed in multiple fabs around the world.