Cymer unveils SmartPulse

SAN DIEGO, USA: Cymer Inc., the world's leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, announced SmartPulse, the next-generation data product following the recently announced OnPulse Plus, that provides chipmakers with additional data collection, reporting and analysis tools.

SmartPulse is the first data management tool to provide wafer-level light source parameter monitoring to enable direct correlation to on-wafer performance for improved process control and yield. SmartPulse also introduces a unique beam metrology module that delivers real-time beam performance data from the light source, resulting in a comprehensive data set. Available on Argon Fluoride (ArF) light sources, SmartPulse represents the most sophisticated light source monitoring tool on the market, offering real-time process control monitoring.

"SmartPulse is a direct response to chipmakers' requests for a tool that can provide wafer-level light source data to help them better optimize the lithography process and improve yields," said Ed Brown, president and COO of Cymer.

"In keeping with our commitment to deliver ongoing value enhancements, SmartPulse offers chipmakers a tool unlike any other on the market, enabling lower process variation and higher yields. Unique to SmartPulse, is the capability to support Fault Detection Classification (FDC) requirements -- allowing chipmakers to detect excursions which can be managed real-time, enabling higher quality output."

SmartPulse's unique beam parameter metrology supports the more challenging lithography illumination schemes necessary for multi patterning on advanced nodes. Such complex illumination schemes are particularly sensitive to beam parameters that are only available through SmartPulse's advanced metrology. This first-ever light source metrology can enable tighter process control and enhance on-wafer results.

SmartPulse re-inforces Cymer's commitment to supply customers with continuous value enhancements for new and previously installed light sources, building on the company's deep technical expertise and worldwide installed base support infrastructure.