ATMI, Ovonyx advance toward commercialization of GST-based PCM devices using CVD processes

DANBURY, USA: ATMI Inc. and Ovonyx Inc. announced milestone progress toward the commercialization of Germanium Antimony Telluride (GST)-based Phase Change Memory (PCM) devices using Chemical Vapor Deposition (CVD) processes.

The performance demonstrated from this on-going joint development work represents a critical advance that will further enable CVD GST-based PCM to scale, and provide a cost-competitive memory technology. PCM is emerging as both a new node in the memory hierarchy due to its unique set of performance attributes as well as a replacement of NOR flash; it is on a trajectory to displace a significant segment of DRAM at advanced technology nodes.

This work enabled conformal depositions in high aspect ratio PCM cells and demonstrated good electrical results when compared to sputter-deposited GST 225 on comparable device structures. Results include various CVD alloy depositions that demonstrated set speed below 50-nanoseconds (ns), typical endurance of 108 to1010 cycles, and data retention that exceeded 100 degrees C for 10 years.

Results of the latest joint research will be published as a peer-reviewed technical paper highlighting the electrical performance in the September issue of Electron Device Letters. ATMI will also be presenting a paper focusing on the CVD process at the EuropeanPhase Change and Ovonics Symposium (E/PCOS).

“GST-based PCM continues to show significant commercial potential as a replacement memory technology for NOR Flash and segments of DRAM markets,” commented Tod Higinbotham, ATMI’s executive vice-president and general manager, microelectronics.

“However, one of the challenges in the path to more rapid scaling has been the lack of a CVD process capable of producing fully confined cells for further reset current reduction. Reduction in reset current will lead to memory devices that use less power, extending battery life and offering higher data bandwidth—important factors in today’s data-centric, highly portable consumer devices.”

The companies plan to license these technologies to the semiconductor industry with ATMI providing the associated precursor materials and the deposition technologies, thus further enabling and accelerating the commercialization of PCM for high performance memory applications. ATMI is on track to demonstrate the CVD GST technology on full 300mm wafers in the fourth quarter of 2010.

“With this achievement, we are realizing a more optimized thermal environment for the phase change volume. The end result is a cost effective, highly scalable device with reduced programming current,” added Tyler Lowrey, Ovonyx president and CEO.

ATMI has been working with Ovonyx as a joint development partner since March 2008. Under the terms of the partnership, Ovonyx has provided all the electrical test chips and performance characterization and holds fundamental intellectual property around PCM.