Two-day plasma processing workshop held

USA: Plasma-Therm has provided a two-day plasma processing workshop at Stanford University’s Nanofabrication Facility (SNF).

Presentations addressed both fundamental and advanced plasma etching and deposition technologies used primarily in semiconductor device fabrication and materials science research. The Stanford facility, part of NNIN (National Nanofabrication Infrastructure Network), provides resources for both academic and industrial users and attracts researchers from throughout the world.

Attendees included graduate students, facility staff, post-doctoral researchers and engineers from 13 local companies from start-ups to Fortune 500. This technology community outreach event attracted researchers involved in projects requiring process capability spanning a broad range of cutting edge research topics as diverse as solar energy, nanostructures, data storage, opto-telecommunications, and MEMS.

Plasma-Therm, a leading semiconductor plasma processing equipment supplier, has held similar one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.

“I thoroughly enjoyed the class- I learned a lot and the slides provided valuable reference material,” said Michelle Rincon, Process Staff Engineer Stanford Nanofabrication Facility. "Many thanks for organizing a great workshop - this was both fun and extremely useful," said Dr. Michael Neumann, Postdoctoral Researcher, Dept. of Physics, Stanford University.

“I was one of the attendees at the workshop and found it extremely useful and informative. Thanks so much for presenting it to us. Though I made notes of all the key points from today, the slides are serving as a great resource. I’m regularly referring to them as embark on a new PECVD adventure,” added Aparna Aryabumi, Engineer at Kovio.

“The opportunity to present and interact with the current and next generation researchers from SNF and the surrounding technical community is greatly appreciated,” explained Dr. David Lishan, Plasma-Therm's principal scientist and workshop series organizer. These well attended workshops are evidence of the interest in plasma processing and the topics in the two day workshop provide researchers an extensive set of relevant tools not often covered in traditional curriculum or training programs.”