BEVERLY, USA: Axcelis Technologies Inc., a leading supplier of innovative, high-productivity solutions for the semiconductor industry, has received an order for the Company's Optima HDx high current implanter from one of the world's largest device manufacturers. The first system shipped in September and will be used to enable production of leading edge CMOS Image Sensor devices.
"We're excited to expand our presence with one of the most innovative device manufacturers. This new order emphasizes the performance advantages that chipmakers can realize with the Optima HDx," said CEO and chairman Mary Puma. "Customers are seeing dramatic results in production, achieving higher yields and improving overall profitability, due to the system's precise process control and high productivity. The system's enabling spot beam technology combined with its proprietary wafer temperature control delivers industry leading performance critical for today's challenging device manufacturing environment."
The Optima HDx high current implanter provides solutions for device manufacturing's lowest energy applications and highest dose requirements with the versatility and extendibility to provide solutions beyond the 22nm technology node.