BEVERLY, USA: Axcelis Technologies Inc. has received a significant, multiple system order from one of the world's largest chip makers.
The chipmaker will use the Company's Integra RS photoresist dry strip cleaning system at fabs in both Asia and the US for high volume production of its most advanced products. The innovative system was selected over competitive products because of its ability to perform cleaning processes on a wide variety of film stacks which required multiple tool types in previous generations.
"We are pleased this long-standing customer has now also designed in our Integra RS dry strip system to support their capacity expansion. When selecting the Integra RS, our customer cited the unmatched process versatility which maximizes productivity and capital efficiency – while meeting the challenges of stringent, next generation processes," noted Bill Bintz, senior vice president of marketing.
"This differentiation makes the Integra ideally suited for a high volume fab environment, focused on advanced device manufacturing."
Integra RS plasma dry strip system from Axcelis was designed to offer unparalleled productivity and unmatched process performance for customers. The systems unique multi-chamber design includes paired-chamber process modules that can run production recipes with the highest throughputs available.
Each one of the chamber pairs can operate independently, giving users the choice of running different cleaning recipes simultaneously or performing maintenance on one module while the others continue to operate. This flexibility allows the system to perform the widest variety of advanced cleaning applications in a high volume manufacturing environment. The platform also includes proprietary technology required to address cleaning challenges in next generation technology nodes.