MALVERN, USA: SEMI-GAS Systems, a division of Applied Energy Systems Inc., and a manufacturer of industry-leading ultra-high purity gas source and distribution systems, offers fully customizable gas equipment for semiconductor OEM process tools. Complete turnkey engineering and design services, as well as build-to-print manufacturing options, are available for custom gas boxes, gas jungles, gas panels and process tool piping modules.
Based on customer requirements, each piece of custom equipment can control, isolate, blend or monitor the flow of process gases within any OEM process tool.
With functionality and fluid schematics customized precisely to the specific process tool and process gas requirements, SEMI-GAS ensures the final product is an exact match to the operational needs of the application. The systems can include a completely custom automatic control solution or a very simple electrical interface and physical dimensions are determined by the space available on the process tool.
All custom gas equipment is manufactured within the company's ultra-high purity manufacturing facility, then thoroughly tested, both analytically and functionally, to the customer's specifications. SEMI-GAS can recommend cost-effective fluid components or utilize components from pre-approved sources for any system. Other expertise and services are also available.
SEMI-GAS custom systems are engineered to be flexible, with many additional features and options available in the mechanical, electrical and enclosure design, as well as special features tailored to precisely meet customer needs.