High flow rates available with SEMI-GAS bulk specialty gas source systems

MALVERN, USA: SEMI-GAS Systems, a division of Applied Energy Systems Inc., and a manufacturer of industry-leading ultra-high purity gas source and distribution systems, offers bulk specialty gas source systems to safely deliver hazardous specialty gases from large vessels at high flow rates. The source systems are designed to supply NH(3), HCl, SiH(4), N(2)O, H(2) and other hazardous specialty process gases at flow rates from 100 slpm to 1,000 slpm.

SEMI-GAS Systems' bulk specialty gas source systems consolidate many gas cabinets into a single system for high volume semiconductor production, as well as for high gas volume consuming processes, as found in LED and solar cell production applications. With consideration to the local climate, the source systems can be installed indoors or outdoors.

Source vessel heating is incorporated into the system to facilitate the liquid to gas phase change and to sustain the high gas flow rates. Additional heating elements within the process gas lines, prior to pressure regulation, also control the enthalpy and undesirable phase changes.

Bulk specialty gas source systems help increase operator safety by minimizing the frequency that the operator must change the empty gas cylinders. Safe operation is also ensured through several levels of system redundancy designed into the source system to continue critical gas supply and system operation at all times, avoiding costly downtime.

Every source system from SEMI-GAS Systems includes a PLC controller designed to monitor analog and digital process sensors, perform purging and cylinder switchover automatically and continuously monitor system conditions for alarms, including flow, pressure, exhaust and fire. The source system will shutdown automatically in the event of an alarm trip. All of these elements can be monitored and controlled via the color touch screen operator interface.

The standard source system enclosures are 86" tall, 40" wide and 23" deep and constructed of welded 11 gage steel. Each features a self-closing and self-latching door and window with 1/4" thick safety glass and polycarbonate face shield for increased operator protection. The included fire sprinkler is UL-approved.