Nova i500 gains market recognition with multiple customers orders

REHOVOT, ISRAEL: Nova Measuring Instruments Ltd, a leader in integrated metrology solutions and provider of leading edge stand alone metrology to the semiconductor process control market, announced that multiple orders from leading edge customers were received for its newest Integrated Metrology system - the Nova i500.

The orders followed the successful completion of a rigorous qualification process, conducted by these customers over several months, to be the primary platform for their integrated process control needs. During qualifications the Nova i500 demonstrated more than 30 percent improvement in throughput and precision compared to the previous model in various production scenarios.

In order for manufacturers to maximize their yield, a narrower wafer-to-wafer process window for CMP process control is needed. This requires higher level of measurement precision and tool to tool matching in a shorter period of time. In addition, yield requirements dictate tighter control of within wafer variations which leads to increased sampling at the wafer level.

These challenges, along with growing demand for more Optical CD measurements during the process, require a better and faster Optical CD integrated metrology tool. Nova i500 provides a powerful solution to address these growing performance demands.

The exceptionally high throughput of the Nova i500 is an enabler for CMP process control on latest generation polishers which are planned to exceed throughputs of around 100 wafers per hour. The combination of high speed wafer processing and continuously shrinking process windows make the Nova i500 an essential element in the overall CMP solution.

The Nova i500 is a significant addition to Nova's product portfolio of innovative metrology solutions. It provides customers with a leap forward in capability while keeping the robust design of previous tool generations. The Nova i500 offers a convenient migration path from Nova's previous Integrated Metrology tool - the NovaScan 3090Next - which currently dominates the Integrated Metrology market and is the benchmark for outstanding reliability and low cost of ownership.

Eitan Oppenhaim, EVP, Global Business Group, said: "The demand for a fast integrated metrology tool that combines precise and sensitive metrology performance along with uncompromised requirements for reliability and Cost of Ownership have become the market standard. Moving to advanced technology nodes will require larger sampling schemes that include Optical CD measurements in order to control the ever tightening CMP process specs. Nova i500 core technology meets all of these requirements for advanced process control both in the Foundries and Memory market segments.

"We are pleased to see that our customers appreciate our proven record and market leadership and decided to keep ordering Nova's latest advanced integrated tool that will assist them to be competitive in their respective markets."