Wednesday, July 6, 2011

MEMS equipment sales strong at Akrion Systems

ALLENTOWN, USA: Akrion Systems LLC, a supplier of advanced surface preparation processes and equipment for microelectronics and solar device manufacturers, has received orders from MEMS manufacturers valued at over $20 million that will ship this year.

The company will ship GAMA wet stations to the Centre de Collaboration MiQro Innovation (C2MI) in Bromont Technoparc, Quebec, Canada as announced in a previous news release and to major suppliers of MEMS devices in Europe and Southeast Asia. All of the equipment is scheduled to be installed by the end of this year.

Akrion Systems has demonstrated wet process expertise by developing innovative equipment and methods for controlled and uniform silicon etching, enhanced particle removal, and for the processing and drying of wafers with high aspect ratio features. Among the company's innovations are i-Clean in situ processing, patented ICE-1 chemical concentration control and the patented DIO3 ozonated-water cleaning method, which replaces sulfuric acid for organic removal applications.

Versatile GAMA batch-immersion systems utilizing these inventions can be found in the fabs of many of the leading MEMS manufacturers worldwide.

Michael Ioannou, CEO and president of Akrion Systems, said: "Sales have been brisk for us this year. In particular, we have experienced a major increase in orders from MEMS customers. New and repeat customers recognize the value we add with our extensive experience and process knowledge to help them find solutions to the many challenges associated with the manufacturing of advanced MEMS devices."

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