AMEC launches second-gen etch tool for 22nm and beyond critical process requirements

SAN FRANCISCO, USA: This week at SEMICON West, Advanced Micro-Fabrication Equipment Inc. (AMEC) will launch the Primo AD-RIE tool - the company's second-generation 300mm very high frequency Advanced Decoupled Reactive Ion Etch (AD-RIE) system for 22nm and beyond critical process requirements.

Leveraging the field-proven capabilities of the earlier Primo D-RIE tool, the Primo AD-RIE features technical innovations to tackle the challenges that complicate the production of leading-edge film stacks, while ensuring superior on-wafer performance. They include: an advanced RF system for process stability and repeatability; better tunability techniques for ultra-fine Critical Dimension (CD) uniformity, and enhanced chamber materials for higher yields and lower defects.

Like its predecessor, the Primo AD-RIE delivers a capital productivity gain of 35 to 50 percent when compared to the industry standard. Overall cost of ownership is reduced by 20 to 40 percent. A compact footprint -- at least 30 percent smaller than the largest competitive system -- completes the solution, making the Primo AD-RIE the most productive and capital-efficient advanced etch tool on the market today.

Tool shipments will begin in the third quarter. The first Primo AD-RIE will go to a tier-one foundry in Asia. The earlier Primo D-RIE tool will continue to be used for all applications above 22nm, and for non-critical applications at 22nm and beyond. The new tool hits the market at a challenging time for fab managers. Relentless scaling and the integration of new materials present technical obstacles, while escalating capex costs are impacting margins.

For etch tool vendors, this means innovating process solutions that are advanced, robust and reliable, but also uncomplicated and capital-efficient. This is AMEC's sweet spot! And it's why more than 30 AMEC tools are positioned today at nine customer sites in Asia. This includes every top foundry in the world. To keep pace with demand, AMEC is currently expanding its manufacturing capacity in China. Also this year, the company will complete a new final assembly and test facility in Zhunan, Taiwan.

"While customers still want the newest and most advanced process technologies, they are more cost-sensitive than ever," said Michael Chu, VP of AMEC's Etch Product Business Group. "The Primo AD-RIE offers the optimal combination of technology innovations and capital productivity for advanced critical processes. This means customers can tackle aggressive process targets with virtually no productivity sacrifice. We are already experiencing strong interest in the tool from established and new customers."