Sabanci University in Istanbul orders electron-beam lithography system from Vistec

ISTANBUL & WATERVLIET, USA: Vistec Lithography Inc. is pleased to announce that is has received an order from Turkey for one of its electron-beam lithography systems.

The global supplier of advanced electron-beam lithography systems will deliver an EBPG5000plusES to the newly formed Nanotechnology and Application Center (SUNAC) of the Sabanci University based in Istanbul. The Gaussian Beam system fulfils the challenging requirements of the institute which will collaborate in the field of nanotechnology research with other institutions.

“The EBPG5000plusES is a 100kV high performance system, which is state of the art. It will enable us to address the nanotechnology development needs of natural sciences, applied sciences and engineering programs”, says Dr. Volkan Özgüz, Director of the Nanotechnology and Application Center. “Due to its flexibility and advantages, the EBPG5000plusES is a perfect investment for the future and will help to establish SUNAC as one of Turkeys leading nanotechnology institution.”

Vistec’s EBPG5000plusES are dedicated electron-beam lithography systems, which have been developed to meet the diverse requirements for advanced nano-lithography applications in direct write for both R&D and production of GaAs devices. It enables a rapid exposure with a 25MHz rate and a minimum feature size of less than 8nm. The EBPG5000plusES system is capable to expose various substrate types including masks and dimensions up to 150mm size.

Vistec is pleased to have received its first order from a Turkish university. ”Due to their flexibility and the multi user environment, our systems are a perfect match to the needs of universities or industry research institutions. After selling a number electron-beam lithography systems to international well-known institutes in the last year, we are highly motivated to continue this positive development in the upcoming year”, says Rainer Schmid, GM at Vistec Lithography.