ISMI offers innovative energy efficiency software for semiconductor manufacturers

AUSTIN, USA: International SEMATECH Manufacturing Initiative (ISMI) has released an enhanced web-based software, Total Equivalent Energy Calculator II (TEECalc II), to track and evaluate the energy performance of semiconductor manufacturing equipment in order to reduce energy consumption and improve energy efficiency.

The goal of TEECalc II is to help IC and equipment manufacturers identify areas to make critical energy performance improvements to their process equipment and facilities.

“The development of a robust data collection and reporting solution for energy reduction is critical to maximize the resource performance and minimize the energy costs of semiconductor manufacturing equipment,” said James Beasley, ISMI project manager. “Equipment manufacturers benefit from TEECalc II by being able to calculate and report key utility and energy usage data. This will aid in design and component selection decisions.”

Conservation of natural resources is of ever-increasing importance due to unpredictable resource costs, regulatory drivers, and customer and community pressures. A collaborative approach between device manufacturers and equipment suppliers to reducing the resources required to operate manufacturing equipment and facilities is required in order to control infrastructure and operating costs, and ultimately improve overall industry performance.

ISMI’s TEECalc II contains resources and analysis tools that allow IC and equipment manufacturers to determine the total energy performance for equipment, based on the process utility consumption rates which are converted into equivalent annual energy usage. The data gathered is based on the SEMI S23 Energy Efficiency and Road-mapping Guidelines and can be used to report and analyze process equipment energy and utility use at multiple levels.