mechatronic systemtechnik presents wafer handling systems TRR200/300 and FPT150/200

VILLACH, AUSTRIA: Carinthia-based mechatronic systemtechnik gmbh manufacturer of thin-wafer handling systems recently came out with two newly developed stand-alone systems: Taiko Ring Remover TRR200/300 and Frame Packing Tool FPT150/200.

For the first time, the Taiko Ring Remover TRR200/300 enables fully automated removal of laser-cut rings from laminated 200mm (8") and 300mm (12") wafers. "Whereas earlier the rings had to be manually separated with big effort, the TRR200/300 enables automated removal with a throughput of 80 wafers per hour", stated Walter Schober, CEO of mechatronic systemtechnik.

The handling system features a dual cassette platform with an automatic cassette detection device and a mapper for detection of quantity, position and possible misalignment of a wafer frame in the cassette. Additionally, the TRR200/300 is fitted with a contact-free opto-electronical eccentricity detector for wafer frames and an OCR unit for bar codes. The new system fulfils guidelines for usage in clean room class 100 according to Federal Standard 209E and is compliant with CE specifications.

The new Frame Packing Tool FPT150/200 is a high-performance fully automatic machine for transfer of 150mm (6") and 200mm (8") wafer frames between cassettes and shipping boxes.

"Thanks to its neat front-mounted operations panel, the machine footprint is reduced by 65 percent. This has resulted in a distinctly more efficient space utilisation of expensive area of clean rooms by up to class 10", Schober declared. "Whereas the machines of competitors process a mere 150 frames per hour, our new development permits to double the throughput", Schober further stated.

For this purpose, the FPT150/200 is fitted with a high-performance, multi-axis robot arm and two independent loading stations. Operation of the machine is through an intuitive and ergonomic user interface on a modern 19" touch screen with optional keyboard. Movement programming is tailored for respective requirements of the handling processes so as to achieve a maximum on output from the FPT150/200.